<Product introduction>

 

• Batch(200wfs/h) type Tool by an automatic transfer cassette
• Phosphorus glass removal after diffusion
• Tank configuration that corresponds to the Mono crystal and polycrystalline is possible

PSG Tool Standard specification
Dimension	18000(W) x 2100(D) x 2600(H)
Throughput	2000wfs/h
Bath Configlation	LD
	Alkali
	Rince-1
	HF-1
	Rince-2
	HF/HNO3
	Rince-3
	HF-2
	Rince-3
	Pre Dry (HOT DIW)
	Dry (HOT Blow)
	ULD
Option	Chemical Supply System, FA etc
Safety Specification	Possible to the corresponding CE-Mark and UL standards