<Product introduction>

 

• Batch type Tool by an automatic transfer cassette
• It is a Tool that performs the final wash after aligning the wafer with a separator
• Automatically perform from washing to drying

Final Cleaning Tool Standard specification
Dimension	14500(W) x 2400(D) x 2200(H)
Throughput	2400we/h
Bath Configlation	LD
	Detergent-1(US)
	Detergent-2(US)
	Detergent-3(US)
	Rinse-1 (US)
	Rinse-2 (US)
	Detergent-4(US)
	Detergent-5(US)
	Rinse-3 (US)
	Rinse-4 (US)
	Rinse-5 (US)
	Pre Dry (HOT DIW)
	Dry (HOT Blow)
	ULD
Option	Chemical Supply System, FA etc Underwater LD, Oily water Separation unit Fire Extinguisher etc
Safety Specification	Possible to the corresponding CE-Mark and UL standards