Clean Conveyor System

Applicable wide range of carrying objects;FOUP,SMIF,Open cassette, Cassette box, and so on. 

Flexible to any line by combination of Turn table, Lifter, Shutter and Transfer equipment

and supporting host communication to optimize transferring efficiency

Semiautomatic Bagging Machine

Automatic loading manually supplied FOSB (Front Opening  Shipping Box) case

Single packing the FOSB in an aseptic condition called clean bag

Second packing it in an aluminum bag


Heat Sealing

Automatic unloading the FOSB at loading section (Returning to the original position)


Wafer transfer system

Custom designed automation systems based on your Inspection machines and various process

equipment, besides EFEM, Handling device and Mini buffer at front side of your machine



Please feel free to contact us for details.

Inquiry about semiconductor


SC Division

For TEL: +81-96-294-1700