Applicable wide range of carrying objects;FOUP,SMIF,Open cassette, Cassette box, and so on. 

Flexible to any line by combination of Turn table, Lifter, Shutter and Transfer equipment

and supporting host communication to optimize transferring efficiency

・Automatic loading manually supplied FOSB (Front Opening  Shipping Box) case

・Single packing the FOSB in an aseptic condition called clean bag

・ Second packing it in an aluminum bag

・Deaerating

・Heat Sealing

・Automatic unloading the FOSB at loading section (Returning to the original position)

Custom designed automation systems based on your Inspection machines and various process

equipment, besides EFEM, Handling device and Mini buffer at front side of your machine