This machine is the equipment which transport 4 inch board to toray, after uniting the position of the orientation flat of the board and the tray by the transport robot which carries a camera, and supply and discharge the tray to the process machine by using the tray transport robot.
(1)Machine size
| Dimensions | W2650mm×D1825mm×H2162mm(With HEPA) |
|---|---|
| Total weight | Approx.800kg |
(2)Work size
| Work | 4inch |
|---|---|
| Tray | 4inch |
| Cassette | For 4inch |
(3)Cleaness
| Cleaness | Class 1,000 |
|---|
(4)Throghtput
| 4inch | 40tray×5works = 200PPH : In the case of continuous permutation movement |
|---|
Remark:When tray stay time occurs for a process condition, the PPH fluctuates.
(5)Utility
| Air | Above 0.5MPa |
|---|---|
| Exhaust | 300L/min |
| Power source | Three phase, AC200V, 40A |
| Targetted Business | LED |
|---|---|
| Applications | Wafer transfer |
Please feel free to contact us for details
Inquiry about memory disk
Memory disk Division
For TEL: +81-42-546-8481
