Basic specification

Thin film laser etching system for small robot manufacture

  • Suitable for manufacturing of small robot and patterning of a-Si of solar battery panel for development, metal thin film of display and clear conducting film.
  • Possible to precise processing for less than 10μm by laser and exclusive optical system.
  • Possible to precise processing for flat patterning without influence from stage acceleration/deceleration by synchronizing of laser and precise stage.
  • Easy operation by Windows GUI.
  • Irradiation microscope is installed and possible to work alignment and processing observation.
  • XYZθ 4 axis automatic stage and auto focus unit are installed and possible for automatic alignment by image processing software.

Thin film laser etching system for large area.

  • Suitable for patterning of a-Si of large area solar panel and clear conductive film.
  • Realizing high through put by laser diverge optical system and patterning plural line collectively.
  • Possible to precise processing for flat patterning without influence from stage acceleration/deceleration by synchronizing of laser and precise stage.
  • Less dust, less vibration, less noise and easy maintenance by linear motor driving stage for scanning axis.
  • Easy operation by Windows GUI.
  • Irradiation microscope is installed and possible to work alignment and processing observation.
  • Alignment camera and image processing software are installed and possible for precise positioning by edge alignment.

Inquiries about laser business.

 

ENGINEERING  DEPT.1

Call: +81-42-542-7100