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Basic Spec.	Model　：　ＹＨＲ　ＳＥＲＩＥＳ
Target Process	：Crystallzation (Amorphous-Silicon, micro-Crystal) ：Activation ：Annealing
Features	：Quick responce High/Low temperature control. 　Rise up rate 4 degree C / sec. (MAX) 　Come down rate 1 degree C / sec. ：Up gread and zone heat source makes a stable temperature. 　+/- 3 degree C (The inner area of 10mm from Glasses edge) ：High temperature, (〜750 degree C) the fewest warp and strain 　for the glass board. ：Use the new developed glass board holding and transfer method. ：High mass production, 20,000 pieces / month. ：1 minute through put ( at 4 chamber configuration )
Main Specification	：Process board size ：300x 400mm class〜 730x 920mm class 　　　　(G6 Deveioping) ：Process chamber ： 1 〜 6 ：Temperature range ： 300 degree C 〜 750 degree C ：Process Gas ： N2 ：Establishment ： Atmosphere

Y.A.C. Co., Ltd. Plasma System （ＰＳ） Division　
Tel ：　+81-42-546-2885

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