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FPD Plasma systems |
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FPD equipment with plasma
Developing high technology equipments with the plasma technologies for
ashing and etching process.
Those equipments will be useful in streamlining production process, mask-saving
technology and growing in size of liquid crystal displays.
They also have a good track record in microfabrication, surface modification
and film stack processing. |
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Semiconductor system |
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Semiconductor process equipment
We developed the first butch type ashing product process equipment with
plasma technology for semiconductor ashing process in the country.
We are working on relation building with customers over large fields, such
as surface modification, sterilization. |
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Other FPD system |
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Other FPD equipment
We developed the high processing technology equipments of anneal treatment.
Those equipments will be useful in streamlining production process, speeding
up technology and growing in size of liquid crystal displays.
And now, G6-size is on development progress.
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Y.A.C. Co., Ltd. Plasma System (PS) Division
Tel : +81-42-546-2885
email: |
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