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This system has both functions of buffer and loading as
a conveyer for clean room. Corresponding to various loading
for FOUP / FOSB / Reticle / POD / SMIFPOD / Flat panel.
Free system configuration is available with the combination
layout of Turntable, Lifter, Shuttle and Auto door.
Supporting host communication interface as well.
We can supply Buffer and Transferring equipment only.
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